- In February 2024, Brooks Instrument introduced the XacTorr XMz Series, a vacuum mass flow controller engineered for high-precision semiconductor manufacturing. Designed to enhance atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes, this advanced controller offers higher accuracy and rapid response times, ensuring optimal performance in critical applications. The XMz Series integrates cutting-edge technology to improve process stability and efficiency
- In December 2023, Horiba expanded its mass flow controller lineup, introducing new models compatible with corrosive gases. This strategic move aims to meet the growing demand in semiconductor and chemical processing industries across Asia and Europe. The latest controllers offer high accuracy, fast response times, and enhanced durability, ensuring optimal performance in challenging environments
- In September 2023, Sensirion AG launched the SFC6000 series, a compact mass flow controller designed for OEMs in medical and analytical instrumentation. This innovative series offers plug-and-play capability, low power consumption, and digital interfaces, ensuring seamless system integration. The SFC6000 controllers provide high accuracy, fast response times, and robust performance, making them ideal for gas chromatography, bioreactors, and medical equipment
- In July 2023, MKS Instruments introduced enhancements to its P-Series mass flow controllers, improving gas compatibility and integrating real-time diagnostics to support Industry 4.0 manufacturing environments. These upgrades aim to optimize performance across electronics, life sciences, and energy sectors, ensuring greater efficiency and reliability in industrial applications. The P-Series controllers now offer advanced monitoring capabilities, enabling precise control and predictive maintenance
- In April 2023, Alicat Scientific introduced the Whisper series, a new generation of low-pressure-drop mass flow controllers designed for biotech, aerospace, and environmental testing applications. These controllers ensure stable control even under extremely low inlet pressures, making them ideal for precision gas flow measurement. The Whisper series features fast response times, high accuracy, and minimal system impact, enhancing performance in critical industries
