- In 2020, Taiwan Semiconductor Manufacturing Co. (TSMC) announced that ~50% of all EUV lithography systems installed and operational worldwide are supplied by it. In November 2020, TSMC placed orders for 13 EUV systems with ASML. These systems are expected to be delivered throughout 2021, though the exact delivery and installation schedule is unknown. Meanwhile, the actual requirements of TSMC for the next year might be as high as 16–17 EUV scanners as the company is ramping-up production of chips using its fabrication technologies that feature EUV layers.
- In July 2020, Canon Inc. launched FPA-8000iW, the first Canon semiconductor lithography system to support manufacturing using large panels that are common in back-end processing.
